Journal of Advances in Nanotechnology

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Advances in Nanotechnology -Nanoelectromechanical systems (NEMS)-Nguyen Toan


Tohoku University,



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Nguyen Toan


AzaAoba 6-6-01,
Aramaki, Aoba-ku,
Sendai 980-8579,

Research Interests:

  • Nanoelectromechanical systems (NEMS)
  • Microelectromechanical systems (MEMS)



  1. Fabrication of High Aspect Ratio SiO2 and Tempax Glass Pillar Structures and Its Application for Optical Modulator Device.
  2. Mechanical quality factor enhancement in silicon micromechanical resonator by low-damage process using neutral beam etching technology.
  3. A capacitive silicon resonator with a movable electrode structure for gap width reduction.
  4. Fabrication of an hermetically packaged silicon resonator on LTCC substrate.
  5. Fabrication and packaging process of silicon resonators capable of the integration of LSI for application of timing device.
  6. A Long Bar Type Silicon Resonator with a High Quality Factor.
  7. Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology.
  8. Fabrication of nano-gap structures based on plastic deformation of strained Si springs by stiction effects.
  9. Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process.
  10. Single and Mechanically Coupled Capacitive Silicon Nanomechanical Resonators.